Fluid Distribution Systems

We offer a variety of equipment, support service and technical expertise to meet application needs in the design and manufacturing of high and low purity fluid delivery, chemical blending and state of the art slurry systems for the semiconductor, solar, and pharmaceutical industries. Our fluid distribution systems improve processes, optimize floor space, minimize downtime and extend product life lowering overall cost of ownership.

DFS systems have gone through the strict SEMI Certification process by a third party reviewer and have been certified in the following:

S2-Environmental Health and safety guideline for Semiconductor manufacturing equipment.
S8-Safety guidelines for ergonomics engineering of semiconductor manufacturing equipment
S10-Safety guideline for risk assessment and risk evaluation process for Semiconductor process equipment.
S13-Safety guideline for operation and maintenance manuals used with semiconductor manufacturing equipment.
S14-Equipment fire risk assessment for Semiconductor process equipment.
F47-Specification for Semiconductor processing equipment voltage sag immunity.

Chemical Delivery

  • Bulk Chemical Systems(Tanker off-load)
  • Single or Multiple Drum Systems
  • Tank Systems (Centrifugal and Pneumatic)
  • Pressure Vessel Systems
  • Mobile Delivery Systems

Blending Systems

  • Bulk Blending
  • Mobile Blending
  • Point Of Use Blending
  • Slurry Blending
  • Ammonium Hydroxide Generation

Waste Systems

  • Industrial Waste Systems
  • Sump Lift Stations
  • Waste Treatment System
  • Reclaim Systems