Todays chemical delivery and blending systems require reliability, space efficiency, and must be maintenance friendly to optimize production, operations and facility space requirements. We apply over 40 years of experience in the design and operation of chemical systems to meet and exceed industry requirements. Because production “uptime” is so critical and chemical systems are one of the main contributors to production “downtime”, we engineer more precise, more reliable, and more space efficient systems.

DFS 450mm High Flow Solvent System

Tuesday, April 9, 2013


Recently DFS partnered with one of the largest Dram and Flash memory companies in the world to develop a new system designed for hazardous chemicals in a Class 1 Div. 2 environment. This chemical system was unique not only for the application but the challenges of achieving the high flows required by the customer. DFS was not only willing but able to engineer a system that achieved flow rates in excess of 60lpm utilizing “High Flow” Levitronix® BPS4000 pumps and Gemu® “High Flow” valves. The DFS team hit the mark when engineering this high purity, high performance system that doesn’t take up valuable facilities space with the small foot print. Moving forward DFS feels this next generation system will lead the way in supplying high purity, high flow chemistries to state of the art Production Fabs all over the world.