Diversified Fluid Solutions provides flexible, scalable precision semiconductor gas and chemical blending and distribution systems that increase uptime by up to 30%


Diversified Fluid Solutions designs and manufactures a wide variety of gas and chemical blending and distribution equipment, provides technical expertise, and delivers flawless support to meet a diverse array of high-purity chemical and gas applications.

Chemical Systems

gas handling systems gas handling systems


Our gas systems portfolio offers a diverse line of ultra high-purity specialty and bulk gas handling equipment and support services.

With the breadth of our product offerings and engineering capabilities, we can provide turnkey solutions or targeted niche products depending on your requirements.


Our DFS Controls team can refine your ideas by combining our experience, creativity, research and real-world common sense. By applying state-of-the-art programming with cutting-edge technology, DFS closed loop process control, point-of-use blending and precision pressure control, we are unmatched in the industry.

field services


Discover how our state-of-the-art equipment and modular solutions can exceed your high-purity process needs by:

  • Increasing process windows
  • Improving process yields
  • Optimizing floor space
  • Minimizing downtime
  • Lowering overall operations costs


Although our systems are designed so that maintenance costs and downtimes are minimal, sometimes maintenance is necessary. Chemical system environments can be harsh and system technologies often require a constant need for replacement parts, rebuilding of specific sections, upgrades and retrofits. We understand that not every company is in need of a new chemical system, so our field team works on not only our own products, but most brands of fluid delivery systems and analytical equipment manufactured over the past 20 years. For systems that we support, we can perform most preventive maintenance tasks.